May 2, 2012
Defect Classification Overview
Classifying defects off-line enables automated inspection systems to maintain their high throughput. Automatically classifying defects provides far greater yield learning than human classification while adjusting for process variation. Before the introduction of Rudolph’s advanced defect classification technology, customers were forced to choose between high performance with a high cost of ownership or low performance and low cost of ownership. Rudolph’s ADC offers uncompromising performance and cost of ownership.