Rudolph Technologies offers a complete off-line all-surface review, Discover® Review Software.
Discover Review is a fast classification solution that rapidly guides users through the sequences of defect classification and correlation.
Discover Review is designed to:
- Maximize tool inspection throughput while Discover Review performs off line
- Allow operators to correlate and visualize defects individually or collectively using an interactive, all-surface wafer map
- View correlated defects based on location - wafer edge, frontside, and backside
- Select individual or multiple images in the Gallery Mode for fast classification and defect comparison
- Export a wafer map in any format supported by our "plug-n-play" wafer maps
- Enhance the value of your all-surface inspection equipment by increasing total inspection and classification throughput