A manual load unpatterned wafer inspection solution
The Reflex TT™ Tool is a manually loaded tool for detecting particles, scratches, area defect and micro-roughness (haze) on unpatterned wafers of various shape and diameter from 50mm up to 300mm and 450mm. It is a very flexible tool for process characterization and contamination monitoring for R&D purposes. Simple operation and user friendly software make the Reflex TT a valuable tool for a wide range of applications.
- Sensitivity down to 68nm LSE on Si
- Laser darkfield measurement technology
- Class 1 self-contained mini-environment
- Various wafers tables available: edge grip for transparent wafers 4”- 8”
- Vacuum chuck for wafers sizes from 4” – 300mm
- Square substrates
- 300mm/450mm version available
- Offline analysis possible
- Silicon
- Glass
- Compound Semiconductors
- Transparent films on Si
- Metal films
- Amorphous Si / Polysilicon
- OLED
- Contamination monitoring
- Tool qualification
- Process development
