Explorer Platform

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Explorer Platform

The Explorer® Inspection Platform delivers fast, accurate and reliable macro inspection with flexible configuration of multi-surface inspection capabilities.

The Explorer Platform allows individual systems to be configured with any combination of wafer front, back, and edge inspection module allowing the user to mix and match throughput and inspection type to best fit specific requirements and reduce cost-of-ownership.

The Explorer Platform is a modular approach to wafer inspection consisting of one or more inspection modules with brightfield and darkfield illumination, a substrate handler, and software that coordinates the activities.