January 1, 2013
JetStep G Series Comparison Table
Rudolph Technologies step-and-repeat photolithography panel printers address the demanding requirements of the display industry with systems featuring the highest resolution in the industry. Our proven stepper technology optimizes performance capabilities with superior cost-of-ownership in Gen 2 through 4.5 configurations.
|JetStep G35||JetStep G45|
|Substrate||Up to Gen 3.5||Up to Gen 4.5|
|Image Field Diameter||80mm/160mm||200mm|
|Depth of Focus||15µm/30µm||9µm/20µm|
|Minimum Feature||2.5µm/5.0µm L/S||1.5µm/2.5µm L/S|