February 14, 2013
Fleet Management via Process Control Software
Presented at Strategies in Light, February 2013
Fleet management via process control software is essential to increasing equipment uptime, improving yield, and reducing production costs in LED manufacturing. Fault Detection and Classification assess tool health and process robustness by tracking tool alarms and equipment stability. Process signal data may be used to generate SPC and trend charts. Run-to-run process automation eliminates manual operator/engineer controlled recipe tuning, and standardizes and improves tuning reliability and accuracy. Yield management systems provide automated reports for data analysis to identify causes of yield loss. Variability and multivariate analysis provide chamber matching capabilities. Correlation, step-contribution analysis, and automated signature analysis allow process engineers to precisely identify yield losses.
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