Company News posted on Feb 23, 2014

Rudolph Technologies Announces Record Installations for its Yield Management Systems

Increasing demand for productivity information driven by needs for increased yields 

Flanders, New Jersey (February 24, 2014)—Rudolph Technologies, Inc. (NYSE: RTEC) announced today completion of record installations in Q4 2013 of its fab-wide yield management software (YMS) products, Discover Enterprise™ and Genesis Enterprise™, which are used by semiconductor manufacturers to obtain valuable process yield and equipment productivity information. In addition to traditional semiconductor manufacturing, Discover Enterprise Software was installed at a multi-billion dollar OEM in multiple labs, replacing the incumbent technology. Rudolph attributes the rise in adoption to the industry’s growing need for productivity data as it seeks to increase the yields of new, increasingly complex manufacturing processes.

The data necessary to generate productivity information comes from many different sources throughout the fab: inspection and metrology systems, tool sensors, tool recipes, electrical tests, and the fab environment. As the complexity and cost of manufacturing processes increase, the value of faster, better analysis to support critical manufacturing decisions grows too, so customers are demanding robust yield management systems that can analyze large, complex data sets quickly and effectively. Rudolph’s fully-integrated YMS solutions are designed to analyze data from disparate sources and multiple sites to maximize productivity across the entire value chain.

“Improving quality and yield as well as tool productivity were the paramount reasons we selected Rudolph’s YMS solutions,” said Philip O’Leary, Six Sigma Master Black Belt, Murata Electronics Oy, the world's leading designer and manufacturer of silicon capacitive sensors: accelerometers, gyroscopes, combined sensors and inclinometers. “The development of better processes and tool productivity will have direct, positive impact on our yield, and ultimately, create a better product for our customers. The ease of installation was remarkable and the product demonstrated immediate value. In addition, the scalability of the software will facilitate our future expansion plans.”

Mike Plisinski, vice president and general manager of Rudolph’s Data Analysis and Review Business Unit, adds, “The integration of our yield management system technologies, Discover Enterprise and Genesis, provides customers with a system designed for storage and alignment of a wide array of data types as well as patented analytics to transform that data into valuable information to help our customers optimize their process, improve equipment productivity, and more rapidly bring new technologies to market.”

Discover Enterprise is a real-time manufacturing monitoring and in-line yield management system that provides the foundation of a fully-integrated database and analytical routines that help semiconductor, LED, compound semi, automotive, FPD, HDD and other related manufacturers improve yield, productivity and profitability in their manufacturing lines. It integrates and analyzes data from all inspection, metrology, process, and test systems in the fab and across the supply chain to provide a complete report of fab-wide yield problems, turning raw data into actionable information separating random from systematic yield loss. Process engineers use this information to optimize process tool performance (fleet management) and quickly identify and correct the causes of yield excursions.

Genesis Enterprise is an offline yield management system that provides data mining, genealogy (unit tracking) and correlation of all data types across the supply chain. The system is designed to maximize factory efficiency and automate the drill down process identifying causes of yield loss. It can be integrated directly with the Discover Enterprise database or be used offline for yield analysis and data mining connecting to raw data files and 3rd party systems. Specialized analysis algorithms identify domain-specific issues, such as wafer processing sequence problems, commonality of effects, product characterization and systematic versus random yield loss. Genesis software seamlessly handles data from any source: parametric, defect, memory, design, or assembly and packaging; and easily integrates all-surface defect analysis, fault detection, and run-to-run process control to help users achieve maximum efficiency.

For more information about Rudolph’s Discover Enterprise and Genesis Enterprise Software, please visit www.Onto Innovationtech.com.

About Murata
Murata Manufacturing Co., Ltd. is a worldwide leader in the design, manufacture and sale of ceramic-based passive electronic components & solutions, communication modules and power supply modules. With annual revenues of ¥681 billion (~$6.8B USD), Murata is committed to the development of advanced electronic materials and leading edge, multi-functional, high-density modules. The company has employees and manufacturing facilities throughout the world. For more information, visit Murata's website at http://www.murata.com/

About Rudolph Technologies
Rudolph Technologies, Inc. is a worldwide leader in the design, development, manufacture and support of defect inspection, advanced packaging lithography, process control metrology, and data analysis systems and software used by semiconductor device manufacturers worldwide. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down the costs and time to market of their products. The Company’s expanding portfolio of equipment and software solutions is used in both the wafer processing and final manufacturing of ICs, and in adjacent markets such as FPD, LED and Solar. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the Company’s website at www.Onto Innovationtech.com.

Safe Harbor Statement
This press release contains forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1995 (the “Act”) which include the benefits to customers of Rudolph’s products, Rudolph’s existing market position and its ability to maintain and advance such position relative to its competitors and Rudolph’s ability to meet the expectations and needs of our customers as well as other matters that are not purely historical data. Rudolph wishes to take advantage of the “safe harbor” provided for by the Act and cautions that actual results may differ materially from those projected as a result of various factors, including risks and uncertainties, many of which are beyond Rudolph’s control. Such factors include, but are not limited to, delays in shipping products for technical performance, component supply or other reasons, the company’s ability to leverage its resources to improve its positions in its core markets and fluctuations in customer capital spending. Additional information and considerations regarding the risks faced by Rudolph are available in Rudolph’s Form 10-K report for the year ended December 31, 2013 and other filings with the Securities and Exchange Commission.  As the forward-looking statements are based on Rudolph’s current expectations, the company cannot guarantee any related future results, levels of activity, performance or achievements. Rudolph does not assume any obligation to update the forward-looking information contained in this press release.

For more informatin, please contact:

Rudolph:
Investors:    
Steven R. Roth   
973.448.4302    
steven.roth@Onto Innovationtech.com

Trade Press:
Amy Pauling
952.259.1794
amy.pauling@Onto Innovationtech.com